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Characterization of Rapid Thermally Nitrided Titanium Films Contacting Silicided and Non-Silicided Junctions
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- Journal:
- MRS Online Proceedings Library Archive / Volume 260 / 1992
- Published online by Cambridge University Press:
- 25 February 2011, 387
- Print publication:
- 1992
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- Article
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The Effect of Polysilicon Doping (Using Ion Implantation or PBr3 Diffusion or Insitu Doping) on TiSi2 Formation
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- Journal:
- MRS Online Proceedings Library Archive / Volume 260 / 1992
- Published online by Cambridge University Press:
- 25 February 2011, 207
- Print publication:
- 1992
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- Article
- Export citation